Facilities
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An Electron Vision E-beam Curing System for SiC device processing
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A UNAXIS (Formerly PlasmaTherm) PECVD System.
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One Karl Suss Mask Aligner for photolithography capable of 0.5 mm dimensions.
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Two state-of-the-art inductive-coupled plasma (high density) system ideally
suited for SiC dry etching. The 100X higher plasma density allows ICP to
be operated at even zero bias, resulting in greatly reduced surface damage
during dry etching, in comparison to the widely used RIE system.
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A Class-100 cleanroom equipped with all IC fabrication tools.
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Two ultra-clean thermal SiO2 growth systems dedicated to SiC processing.
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One Applied Materials LPCVD system for low temperature SiO2 growth.
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Rotating substrate three gun sputtering system for multilayer metalization
and thermal evaperator for Al metalization.
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One HP8510B/HP8516A 45MHz to 40 GHz Network Analyzer/S-parameter Test
Set and one HP 8566B Power Spectrum Analyzer.
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Two state-of-the-art MMR systems capable of 450C power device testing.
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One temperature-controlled Hall effect system for implantation structure
evaluation.
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One Keithley quasi-static simultaneous C-V system capable of 80 to 700
K interface Dit and oxide charge Qf measurements.
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One state-of-the-art S&K Semiconductor Bonding System capable of
wire and ribbon bonding.
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One state-of-the-art Tek371A Curve Tracer capable of SiC diode and transistor
measurements up to 3,000V and 400 Amp.
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A custom-designed state-of-the-art LEM High Power Transient Evaluator
capable of 2ns, 300C, 3,000V, 250A switching evaluation of VJFETs, diodes,
MOSFETs, BJTs, GTOs, MCTs, and IGBTs, and PWM Inverter circuits and other
power circuits.
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A Computer controlled 2HP motor controller demonstration test bed based
on Si-IGBTs and Si-PiN diodes with DSP-based inverter controller.
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A Computer controlled 5 HP motor controller demonstration test bed based
on Si-IGBTs and Si-PiN diodes for up to 16 kHz operation.
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One Power 10 DC power supply for 400VDC-70A.
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One Power Analyser for Inverter power measurements.
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Device and Process Simulation
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Hardware
Two Sun UltrSparc 30 Workstations
One Sun Blade 2000 Workstation
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Software
ISE TCAD Device Simulator
ProfileCode Implantation Profile Simulator
PSPICES