Facility Fee Schedule
SiCLAB equipment fee schedule is shown below. Advanced reservation
is required. But please note that SiCLAB students have the first priority
in using the equipment purchased by SiCLAB for SiCLAB projects and potential
contamination is not permitted. Note also that all users should have permission
and been trained for access to MERL if the equipment is located at MERL.
Because of the substantial maintenance cost and repair cost required for
the following special equipment and borne by SiCLAB, regular users will
be charged an annual fee which includes costs to cover chemicals, gases,
and general supplies besides the regular maintenance cost and repair cost.
Please process your payment of annual or one time fee by contacting Judy
Pellicane at CAIP Center (732 445-6244) before permission can be granted
for equipment use. Users understand and agree that damage caused by use
against established procedure will be repaired immediately through SiCLABs
arrangement but all repair related costs will be the responsibility of
the user who causes the damage. The emergency repair costs are in addition
to the following regular user charge. Outside users are encouraged to become
a SiCLAB sponsor (funding >$50,000/year). Contact Prof. Zhao to find details
and benefits to become a SiCLAB sponsor.
-
Regular Rutgers user of:
Unasix/Plasma-therm PECVD: $3,600 per year per user
Multiple-target rotating Denton sputtering system: $3,600 per year
per user
MJB-3 mask aligner: $3,600 per year per user
LEMsys high-speed, high-temperature and high-power testing system:
$3,600 per year per user
Vision E-beam curing system: $3,600 per year per user
-
Regular outside user of:
Unasix/Plasma-therm PECVD: $7,200 per year per user
Multiple-target rotating Denton sputtering system: $7,200 per year
per user
MJB-3 mask aligner: $7,200 per year per user
LEMsys high-speed, high-temperature and high-power testing system:
$7,200 per year per user
Vision E-beam curing system: $7,200 per year per user
-
One time user:
$300 per item per time